Nondestructive topographic evaluation of ion implanted layers on GaAs substrates by optical absorption
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OpenAlex topics: Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices · GaN-based semiconductor devices and materials
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References (8)
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4. P. Dobrilla, J.S. Blakemore: J. Appl. Phys.58, 208 (1985)10.1063/1.335714 ↗
5. G.M. Martin: Appl. Phys. Lett.39, 747 (1981)10.1063/1.92852 ↗
6. J. Windscheif, W. Wettling: Inst. Phys. Conf. Ser.83, 197 (1987)
7. J.C. Dyment, J.C. North, L.A. D'Asaro: J. Appl. Phys.44, 207 (1973)10.1063/1.1661863 ↗
8. W.L. Smith, A. Rosencwaig, D.L. Willenborg, J. Opsal, W.M. Taylor: Solid State Techn.29, 85 (1986)