journal article·2012-07

CMOS-Compatible Generation of Self-Organized 3-D Ge Quantum Dot Array for Photonic and Thermoelectric Applications

Ching-Chi Wang, Kuan-Hung Chen, Inn-Hao Chen, Wei-Ting Lai, Hung-Tai Chang, Wen-Yen Chen, Jung-Chao Hsu, Shen-Wei Lee, Tzu-Min Hsu, Ming-Tsung Hung, Pei-Wen Li

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Abstract

We demonstrate a CMOS-compatible scheme, selective oxidation of SiGe pillars, for creating well-organized 3-D Ge quantum dot (QD) array by guiding QDs migration along the oxidation path and thus placing them on targeted locations where the ultimate oxidation occurs. Stacked QDs exhibit tunable luminescence over the visible and possess low thermal conductivity, showing promise for nanophotonic and energy conversion devices.
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Research context

OpenAlex topics: Semiconductor Quantum Structures and Devices · Photonic and Optical Devices · Nanowire Synthesis and Applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Electrical Engineering and the Center for Nano Science and Technology, National Central University, Taoyuan, Taiwan

Department of Electrical Engineering and Center for Nano Science and Technology, National Central University, Taoyuan , Taiwan

Institute of Material Engineering , National Central University, Taoyuan, Taiwan

Department of Physics, National Central University, Taoyuan, Taiwan

Department of Mechanical Engineering , National Central University, Taoyuan, Taiwan

Department of Mechanical Engineering, National Central University, Taoyuan, Taiwan

References (16)

Show source-provided references
1. 10.1021/cg200470f10.1021/cg200470f ↗
2. 10.1088/0957-4484/22/43/43560210.1088/0957-4484/22/43/435602 ↗
3. 10.1088/0268-1242/10/8/01010.1088/0268-1242/10/8/010 ↗
4. 10.1063/1.181442910.1063/1.1814429 ↗
5. 10.1103/PhysRevLett.94.08740510.1103/PhysRevLett.94.087405 ↗
6. 10.1063/1.358076810.1063/1.3580768 ↗
7. 10.1103/PhysRevB.61.1598810.1103/PhysRevB.61.15988 ↗
8. 10.1063/1.133921010.1063/1.1339210 ↗
9. 10.1126/science.115537410.1126/science.1155374 ↗
10. 10.1103/PhysRevB.51.165810.1103/PhysRevB.51.1658 ↗
11. 10.1126/science.107288610.1126/science.1072886 ↗
12. 10.1063/1.135645510.1063/1.1356455 ↗
13. 10.1038/nnano.2008.41710.1038/nnano.2008.417 ↗
14. 10.1038/nature0614110.1038/nature06141 ↗
15. 10.1109/IEDM.2004.141910410.1109/IEDM.2004.1419104 ↗
16. 10.1088/0957-4484/21/5/05530210.1088/0957-4484/21/5/055302 ↗