C 1s photoemission investigation of substrate bias and annealing temperature influencing the microstructure of amorphous diamond films
Source abstract
Abstract
The hybridization composition of amorphous diamond films deposited using a filtered arc has been investigated as functions of the substrate bias and the annealing temperature by the deconvolution of C 1s photoemission spectra. The chemical shift and the half width of the entire C 1s spectrum have demonstrated the clear regularities to the changing bias and temperature. The XPS C 1s core level spectra can provide a powerful way to follow the evolution of the sp3 bonding configurations.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · High-pressure geophysics and materials · Metal and Thin Film Mechanics
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (14)
Show source-provided references
1. J. Robterson, Mater. Sci. Eng. Rep. 37, 129 (2002)10.1016/S0927-796X(02)00005-0 ↗
2. J.C. Han, J.Q. Zhu, L. Niu, J. Lu, W.S. Chen, Surf. Coat. Technol. 201, 5323 (2007)10.1016/j.surfcoat.2006.07.025 ↗
3. T.M. Alam, T.A. Friedmann, P.A. Schultz, D. Sebastiani, Phys. Rev. B 67, 245309 (2003)10.1103/PhysRevB.67.245309 ↗
4. Y. Kazuhiro, W. Toshiya, W. Koichiro, K. Fumio, K. Yoshinori, F. Shuzo, Diam. Relat. Mater. 10, 895 (2001)10.1016/S0925-9635(00)00583-5 ↗
5. C. Mapelli, C. Castiglioni, G. Zerbi, K. Müllen, Phys. Rev. B 60, 12710 (1999)10.1103/PhysRevB.60.12710 ↗
6. K.W.R. Gilkes, S. Prawer, K.W. Nugent, J. Robertson, H.S. Sands, Y. Lifshitz, X. Shi, J. Appl. Phys. 87, 7283 (2000)10.1063/1.372981 ↗
7. J.C. Lascovich, R. Giorgi, S. Scaglione, Appl. Surf. Sci. 47, 17 (1991)10.1016/0169-4332(91)90098-5 ↗
8. P.A. Brühwiler, A.J. Maxwell, C. Puglia, A. Nilsson, S. Andersson, N. Mårtensson, Phys. Rev. Lett. 74, 614 (1995)10.1103/PhysRevLett.74.614 ↗
9. J.F. Morar, F.J. Himpsel, G. Hollinger, J.L. Jordan, G. Hughes, F.R. McFeely, Phys. Rev. B 33, 1340 (1986)10.1103/PhysRevB.33.1340 ↗
10. J.Q. Zhu, J.C. Han, X. Han, S.H. Meng, Z.C. Jia, J. Yang, K. Cheng, Scripta Mater. 55, 1167 (2006)10.1016/j.scriptamat.2006.08.031 ↗
11. Y. Lifshitz, S.R. Kasi, J.W. Rabalais, W. Eckstein, Phys. Rev. B 41, 10468 (1990)10.1103/PhysRevB.41.10468 ↗
12. J. Daz, G. Paolicelli, S. Ferrer, F. Comin, Phys. Rev. B 54, 8064 (1996)10.1103/PhysRevB.54.8064 ↗
13. S. Turgeon, R.W. Paynter, Thin Solid Films 394, 44 (2001)10.1016/S0040-6090(01)01134-8 ↗
14. P.S. Bagus, F. Illas, G. Pacchioni, F. Parmigiani, J. Electron Spectrosc. Relat. Phenom. 100, 215 (1999)10.1016/S0368-2048(99)00048-1 ↗