journal article·1988-08

Damage distribution in Si+-implanted gallium arsenide-lattice imaging

G. Vitali, M. Kalitzova, N. Pashov, P. Werner, H. Bartsch

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Abstract

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Research context

OpenAlex topics: Semiconductor materials and interfaces · Ion-surface interactions and analysis · Silicon Nanostructures and Photoluminescence

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References (14)

Show source-provided references
1. Gallium Arsenide, Materials, Devices and Circuits, ed. by M.J. Howes, D.V. Morgan (Wiley, New York, 1985)
2. T. Sands, D.K. Sadana, R. Gronsky, J. Washburn: Appl. Phys. Lett.44, 874 (1984)10.1063/1.94963 ↗
3. D.K. Sadana: Nucl. Instr. Meth.B718, 375 (1985)10.1016/0168-583X(85)90585-3 ↗
4. N.P. Morozov, V.D. Skupov, D.I. Tetel'baum: Phys. Techn. Poluprov19, 464 (1985)
5. E. Wilk, W. Wesch, K. Hehl: Phys. Stat. Solidi (a)76, K 197 (1983)10.1002/pssa.2210760266 ↗
6. T.T. Sheng, R.B. Markus: J. Elettrochem. Soc.127, 737 (1980)10.1149/1.2129742 ↗
7. R. Hillebrand, R. Scheerschmidt, W. Neumann: InElectron Microscopy, Proc. 8th European Congress on Electron Microscopy, ed. by A. Csánády, P. Röhlich, D. Szabó, Budapest (1984) p. 271
8. A.F. Burenkov, F.F. Komarov, M.A. Kumakhov, M.M. Temkin:Tables of Ion Implantation Spatial Distribution (Gordon and Breach, New York 1986)
9. E. Wendler, W. Wesh, G. Götz: Phys. Stat. Solidi (a)93, 207 (1986)10.1002/pssa.2210930126 ↗
10. R.C. Newman, J. Woodhead: J. Phys. C17, 1405 (1984)10.1088/0022-3719/17/8/015 ↗
11. H. Okamoto, M. Seki, Y. Horikoshi: Jpn. J. Appl. Phys.22, P. 2, L367 (1983)
12. J.L. Hutchinson: In Electron Microscopy (1984), Proc. 8th European Congress on Electron Microscopy, ed. by A. Csánády, P. Röhlich, D. Szabó, Budapest (1984) p. 505
13. M.G. Kalitzova, D.S. Karpuzov, N.K. Pashov: Philos. Mag.A51, 373 (1985)10.1080/01418618508237561 ↗
14. M. Pasemann, H. Johansen, H. Blumtritt, R. Gleichmann: InElektronenmikroscopie in der Festkörperphysik, Hrsg: H. Bethge und J. Heydenreich (VEB Deutscher Verlag der Wissenschaften, Berlin 1982) p. 387