journal article·1986-08

Ar ion laser assisted chemical etching of via holes in tungsten sheets in air

G. Koren

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Plasma Diagnostics and Applications

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References (7)

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1. D.J. Ehrlich, R.M. Osgood, Jr., T.F. Deutsch: Appl. Phys. Lett.38, 1018 (1981)10.1063/1.92228 ↗
2. G. Koren: Appl. Phys. Lett.47, 1012 (1985)10.1063/1.96422 ↗
3. G. Koren: J. Appl. Phys.59, 1667 (1986)10.1063/1.336428 ↗
4. G.L. Loper, M.D. Tabat: Appl. Phys. Lett.46, 654 (1985) and Proc. Soc. Photo-Opt. Instrum. Eng. (SPIE)459, 121 (1984)10.1063/1.95518 ↗
5. D. Schneider: InGemelin Handbook of Inorganic Chemistry, W. Wolfram, B1, 143, ed. by H. Katscher (Springer, Berlin, Heidelberg 1978)
6. American Institute of Physics Handbook, ed. by G. Haas, L. Hadley (McGraw-Hill, New York 1957). Sect. 6g, Optical Properties of Metals
7. CRC Handbook of Chemistry and Physics, ed. by R.C. Weast (CRC Press, Boca Raton, FL 1984)