DataVXApplied Physics A: Materials Science & ProcessingPaper
journal article·1998-03-01

The effect of germane variation on microstructure in polycrystalline Si/Si 1-x Ge x thin films grown by rapid thermal chemical vapour deposition: fractal characterisation using scanning probe microscopy

P.A. Campbell, D.G. Walmsley, R.L.F. Chong, D. Gay, H.S. Gamble, D.W. McNeill

Applied Physics A: Materials Science & Processing· Volume 66· Issue 7
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Materials processing

OpenAlex topics: Surface Roughness and Optical Measurements · Adhesion, Friction, and Surface Interactions · Force Microscopy Techniques and Applications

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