DataVXApplied Physics A: Materials Science & ProcessingPaper
journal article·1998-03-01

Multi-step process control and characterization of scanning probe lithography

C.A. Peterson, T.G. Ruskell, J.L. Pyle, R.K. Workman, X. Yao, J.P. Hunt, D. Sarid, H.G. Parks, B. Vermeire

Applied Physics A: Materials Science & Processing· Volume 66· Issue 7
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OpenAlex topics: Advancements in Photolithography Techniques · Force Microscopy Techniques and Applications · Nanofabrication and Lithography Techniques

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