journal article·1980-09

Distribution and heat-treatment migration studies of Cr implanted GaAs by SIMS

F. Simondet, C. Venger, G. M. Martin, J. Chaumont

Applied Physics· Volume 23· Issue 1
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OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices

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References (11)

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