Origin of ion beam mixing effects on morphological features in solid-phase titanium silicide formation
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OpenAlex topics: Semiconductor materials and interfaces · Ion-surface interactions and analysis · Silicon and Solar Cell Technologies
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References (6)
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5. K. Maex, L. Van Den Hove, R.F. De Keersmaecker: Thin Solid Films 140, 149?161 (1986)10.1016/0040-6090(86)90169-0 ↗
6. T. Suzuki, T. Miyazaki, K. Ohyu, N. Natsuaki: Extended Abstracts of 18th Conf. Solid State Devices and Materials. Tokyo (1986) pp. 753?754