journal article·1998-03

An AFM-based surface oxidation process for heavily carbon-doped p-type GaAs with a hole concentration of 1.5×1021 cm-3

J.-I. Shirakashi, K. Matsumoto, M. Konagai

Applied Physics A· Volume 66· Issue S1
Publisher page

Abstract

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Research context

OpenAlex topics: Semiconductor materials and devices · Semiconductor Quantum Structures and Devices · GaN-based semiconductor devices and materials

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