journal article·1995-12

Dopant activation in Sb-implanted relaxed Si1?xGex alloy layers grown on compositionally graded buffers

C. O'Raifeartaigh, A. Nylandsted Larsen, F. Cristiano, P. L. F. Hemment

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OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and interfaces · Silicon Nanostructures and Photoluminescence

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