Iron contamination in ion implanted silicon, as revealed by x-ray and electron diffraction
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Research context
OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and interfaces · Advanced Surface Polishing Techniques
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References (7)
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4. M. Servidori: Unpublished
5. N. Natsuaki, M. Tamura, M. Miyao, T. Tokuyama: Jpn. J. Appl. Phys.16, Suppl. 16?1, 47 (1977)10.7567/JJAPS.16S1.47 ↗
6. P.F. Schmidt, C.W. Pearce: J. Electrochem. Soc.128, 630 (1981)10.1149/1.2127472 ↗
7. G. Lulli: Private communication