Supersaturated Si-As alloy formation by ion implantation and pulsed electron beam annealing
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Ion-surface interactions and analysis · Silicon and Solar Cell Technologies · Semiconductor materials and interfaces
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (10)
Show source-provided references
1. C.W. White, P.P. Pronko, S.R. Wilson, B.R. Appleton, J. Narayan, R.T. Young: J. Appl. Phys.50, 3261 (1979)10.1063/1.326366 ↗
2. C.W. White, S.R. Wilson, B.R. Appleton, F.W. Young: J. Appl. Phys.51, 738 (1980)10.1063/1.327334 ↗
3. J. Geerk, F. Ratzel: KfK-Report 2912 (1980)
4. A. Turos, J. Geerk: Appl. Phys.22, 385 (1980)10.1007/BF00901061 ↗
5. W.K. Chu, J.W. Mayer, M.-A. Nicolet:Backscattering Spectrometry (Academic Press, New York 1978)
6. J.F. Gibbons, W.S. Johnson, S.W. Mylroie:Projected Range Statistics (Halstead Press 1975)
7. H. Kodera: Jap. J. Appl. Phys.2, 212 (1963)10.1143/JJAP.2.212 ↗
8. J.H. Barrett: Phys. Rev.B3, 1527 (1971)10.1103/PhysRevB.3.1527 ↗
9. C.W. White, B.R. Appleton, B. Stritzker, D.M. Zehner, S.R. Wilson: InLaser and Electron-Beam Solid Interactions and Material Processing, ed. by J.F. Gibbons et al. (Elsevier, North-Holland, Amsterdam 1981)
10. W.K. Chu, S.R. Mader, E. Rimini: InLaser and Electron Beam Processing of Materials, ed. by C.W. White and P.S. Peercy (Academic Press, New York 1980)