journal article·1980-09

High-temperature real-time studies of lattice strains induced by localized oxidation of silicon

G. Franz, W. Hartmann

Applied Physics· Volume 23· Issue 1
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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and devices · Thin-Film Transistor Technologies

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References (17)

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