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OpenAlex topics: Nanofabrication and Lithography Techniques · Force Microscopy Techniques and Applications · Nanotechnology research and applications
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References (2)
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1. S.Y. Chou, P.R. Krauss, P.J. Renstrom, Imprint of sub-25 nm vias and trenches in polymers. Appl. Phys. Lett. 67(21), 3114 (1995)10.1063/1.114851 ↗
2. From 1974 to 1976 (20 years ahead the 1995 work), S. Fujimori and co-workers at NTT experimented with a method of embossing as lithography, and they concluded that the resolution of their method was about 1 micron and did not continue the work. Unfortunately, Fujimori’s work (which is published in Japanese and in conference proceedings and Lab Reports, long before internet age) was virtually unknown until his 2009 paper that recounts his 1974 work