Rapid thermal annealing of high dose arsenic-implanted silicon
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and interfaces · Thin-Film Transistor Technologies
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (31)
Show source-provided references
1. M.J. Tsai, F.F. Morehead, J.E.E. Baglin, A.E. Michel: J. Appl. Phys. 51, 3230 (1980)10.1063/1.328078 ↗
2. R.B. Fair, J.J. Wortman, J. Liu: J. Electrochem. Soc. 131, 2387 (1984)10.1149/1.2115263 ↗
3. R. Kwor, D.L. Kwong, Y.K. Yeo: Appl. Phys. Lett. 45, 77 (1984)10.1063/1.94975 ↗
4. J.J. Grob, A. Grob, R. Stuck, M. Ajaka, S. Unamuno, P. Siffert: MRS-Europe Spring Meeting, Strasbourg, 1985
5. S.R. Wilson, W.M. Paulson, R.B. Gregory, A.H. Hamdi, F.D. McDaniel: J. Appl. Phys. 55, 4162 (1984)10.1063/1.333034 ↗
6. R.T. Hodgson, V. Deline, S.M. Mader, F.F. Morehead, J. Gelpey: Mat. Res. Soc. Symp. Proc. Vol. 23, 253 (1984)10.1557/PROC-23-253 ↗
7. A. Michel: Mat. Res. Soc. Symp. Proc. Vol. 52, 3 (1986)10.1557/PROC-52-3 ↗
8. T.O. Sedgwick, A.E. Michel, S.A. Cohen, V.R. Deline, G.S. Oehrlein: Appl. Phys. Lett. 47, 848 (1985)10.1063/1.96423 ↗
9. J.L. Hoyt, J.F. Gibbons: Mat. Res. Soc. Symp. Proc. Vol. 52, 15 (1986)10.1557/PROC-52-15 ↗
10. S. Yu. Shiryaev, A. Nylandsted Larsen, E. Schwartz S�rensen, P. Tidemand-Petersson: Nucl. Instrum. Methods B 19/20, 507 (1987)10.1016/S0168-583X(87)80101-5 ↗
11. T.E. Seidel, D.J. Lischner, C.S. Pai, R.V. Knoell, D.M. Maher, D.C. Jacobson: Nucl. Instrum. Methods B 7/8, 251 (1985)10.1016/0168-583X(85)90562-2 ↗
12. R.B. Fair: In Impurity Doping, ed. by F.F.Y. Wang (North-Holland, Oxford 1981) p. 361
13. C.P. Ho, J.D. Plummer, S.E. Hansen, R.W. Dutton: IEEE Trans. ED-30, 1418 (1983)
14. A. Kamgar, F.A. Baiocchi, T.T. Sheng: Appl. Phys. Lett. 48, 1090 (1986)10.1063/1.96607 ↗
15. A. Kamgar, F.A. Baiocchi: Mat. Res. Soc. Symp. Proc. Vol. 52, 23 (1986)10.1557/PROC-52-23 ↗
16. R. Galloni, R. Rizzoli, A. Nylndsted Larsen: MRS-Europe Spring Meeting, Strasbourg, 1985
17. A. Lietola, R.B. Gold, J.F. Gibbons, T.W. Sigmon, P.D. Scovell, J.M. Joung: J. Appl. Phys. 52, 230 (1981)10.1063/1.328482 ↗
18. D. Nobili, A. Carabelas, G. Celotti, S. Solmi: J. Electrochem. Soc. 130, 922 (1983)10.1149/1.2119859 ↗
19. E. Guerrero, H. P�tzl, R. Tielert, M. Grasserbauer, G. Stingeder: J. Electrochem. Soc. 129, 1826 (1982)10.1149/1.2124302 ↗
20. P.H. Tsien, J. Goetzlich, H. Ryssel, I. Ruge: J. Appl. Phys. 53, 683 (1982)10.1063/1.329974 ↗
21. D. Panknin, E. Wieser, R. Klabes, H. Syhre: Phys. Status Solidi A 77, 553 (1883)
22. A. Lietola, J.F. Gibbons, T.W. Sigmon: Appl. Phys. Lett. 36, 765 (1980)10.1063/1.91650 ↗
23. A. Lietola, J.F. Gibbons, T.J. Magee, J. Peng, J. Hong: Appl. Phys. Lett. 35, 532 (1979)10.1063/1.91198 ↗
24. J.J. Grob, S. Unamuno, A. Grob, M. Ajaka, A. Salaouli, R. Stuck: Nucl. Instrum. Methods B 19/20, 501 (1987)10.1016/S0168-583X(87)80100-3 ↗
25. R. Kwor, D.L. Kwong, C.C. Ho, B.Y. Tsaur, S. Baumann: J. Electrochem. Soc. 132, 1201 (1985)10.1149/1.2114059 ↗
26. G. Masetti, M. Severi, S. Solmi: IEEE Trans. ED-30, 764 (1983)10.1109/T-ED.1983.21207 ↗
27. W.K. Chu: Appl. Phys. Lett. 36, 273 (1980)10.1063/1.91450 ↗
28. J. Goetzlich, P.H. Tsien, H. Ryssel: Mat. Res. Soc. Symp. Proc. Vol. 23, 235 (1984)10.1557/PROC-23-235 ↗
29. V.E. Borisenko, S.G. Yudin: Phys. Status Solidi A 101, 123 (1987)10.1002/pssa.2211010113 ↗
30. H. Kerkow, G. Kreysch, B. Lukasch: Phys. Status Solidi A 82, 125 (1984)10.1002/pssa.2210820115 ↗
31. J.S. Williams: Nucl. Instrum. Methods 209/210, 228 (1983)