Tantalum and cobalt suicides: Temperature sensor applications
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Semiconductor materials and interfaces · Semiconductor materials and devices · Ion-surface interactions and analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (14)
Show source-provided references
1. S.P. Murarka:Silicides for VLSI Applications (Academic, London 1983)
2. S.C. Edwards, R.A. Collins, G. Dearnaley: Vacuum34, 1017 (1984)10.1016/0042-207X(84)90190-8 ↗
3. J.C. Phillips: InThin Film Phenomena — Interfaces and Interactions, ed. by J.E.E. Baglin, J.M. Poate (Electrochem. Soc., Princeton, NJ 1978)
4. K.N. Tu, J.W. Mayer: InThin Films Interdiffusion and Reactions, ed. by J.M. Poate, K.N. Tu, J.W. Mayer (Wiley, New York 1978)
5. G. Ottaviani: J. Vac. Sci. Technol.16, 1112 (1979)10.1116/1.570170 ↗
6. J. Lindhard, M. Scharff, H.E. Schiott: Kgl. Danske. Vid. Selsk. Mat. Fys. Medd.33, 1 (1963)
7. W.-K. Chu, J.W. Mayer, M. Nicolet:Backscattering Spectrometry (Academic, London 1978)
8. M.A. Nicolet, S.S. Lau: InVLSI Electronic Microstructure Science, ed. by N.G. Einspruch, G.B. Larrabee (Academic, London 1983)
9. M.Y. Tsai, C.S. Peterson, F.M. d'Heurle, V. Maniscalco: Appl. Phys. Lett.37, 295 (1980)10.1063/1.91912 ↗
10. A. Van der Zeil:Solid State Physical Electronics (Prentice Hall, Englewood Cliffs, NJ 1968)
11. S.P. Murarka, M.H. Read, C.J. Doherty, D.B. Fraser: J. Electrochem. Soc.129, 293 (1982)10.1149/1.2123815 ↗
12. D. McE. Boulin, P.F. Bechtold, D.B. Fraser, E. Kinsbron: To be published
13. D. Robins: Philos. Mag.3, 313 (1958)10.1080/14786435808236819 ↗
14. S.P. Murarka: J. Vac. Sci. Technol.17, 775 (1980)10.1116/1.570560 ↗