A Novel Nanofabrication Damascene Lift-Off Technique
Source abstract
Abstract
We introduce a new lift-off technique, which, compared to the conventional lift-off process, has both high yield (>;90%) and high reproducibility (>;95%). It has been shown that by etching after pattern transfer and prior to material deposition, the adhesion of the deposited material to the substrate is improved and roughness of feature edges is eliminated. This procedure is tailored to meet fabrication reproducibility criteria for nanoscale as well as microscale features.
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Research context
OpenAlex topics: Nanofabrication and Lithography Techniques · Advancements in Photolithography Techniques · Advanced Surface Polishing Techniques
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References (13)
Show source-provided references
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