journal article·1994-01

Characterization of SIPOS films by spectroscopic ellipsometry and transmission electron microscopy

G. Kragler, H. Bender, G. Willeke, E. Bucher, J. Vanhellemont

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Abstract

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Research context

OpenAlex topics: Analytical Chemistry and Sensors · Gas Sensing Nanomaterials and Sensors · Chalcogenide Semiconductor Thin Films

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References (10)

Show source-provided references
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2. W. Waldvogel, M.Ch. Lux-Steiner, E. Bucher, A.E. Widmer, R. Fehlmann: Proc. 9th E.C. PVSEC, Freiburg, Germany (1989) p. 757
3. J. Vanhellemont, I. De Wolf, J. Alay, W. Vandervorst, G. Kragler, H. Bender, G. Willeke, E. Bucher: Proc. 11th E.C. PVSEC, Montreux (Switzerland) (1992)
4. D.A.G. Bruggeman: Ann. Phys. 24, 636 (1935)10.1002/andp.19354160705 ↗
5. D.E. Aspnes, A.A. Studna, E. Kinsbron: Phys. Rev. B 29, 768 (1984)10.1103/PhysRevB.29.768 ↗
6. E.D. Palik (ed.): Handbook of Optical Constants of Solids (Academic, Boston 1985)
7. D.E. Aspnes: Thin Solid Films 89, 249 (1982)10.1016/0040-6090(82)90590-9 ↗
8. G. Harbeke, E. Meier, J.R. Sandercock, M. Tgetgel, M.T. Duffy, R.A. Soltis: RCA Rev. 44, 21 (1983)
9. M.L. Hitchman, J. Kane: J. Crystal Growth 55, 485 (1981)10.1016/0022-0248(81)90106-8 ↗
10. A.E. Widmer, G. Harbeke, L. Krausbauer, E.F. Steigmeier: J. Electrochem. Soc. 133, 1880 (1986)10.1149/1.2109041 ↗