Channeling and RHEED analyses of Pb-implantation in silicon
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OpenAlex topics: Silicon and Solar Cell Technologies · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and interfaces
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References (9)
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4. B.Svenningsen, A.Johansen, L.T.Chadderton, J.L.Whitton: The Application of Ion Beams to Materials (Inst. of Phys. Conference Ser. n. 28, 1976) p. 142
5. J.S.Williams: In:Ion Beam Surface Layer Analysis ed. by O.Meyer, G.Linker and F.Käppler (Plenum Press, New York 1975) Vol. 1, p. 220
6. H.Hansen:Constitution of Binary Alloys (McGraw-Hill, New York 1958)
7. W.K.Chu, J.W.Mayer, M.A.Nicolet, T.M.Buck, G.Amsel, E.Eisen: Thins Solid Films13, 123 (1973)
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9. P.Baeri, S.U.Campisano, G.Ciavola, G.Foti, E.Rimini: Appl. Phys. Lett.26, 154 (1975)10.1063/1.88123 ↗