journal article·1989-12

Formation of p-type layer by KrF excimer laser doping of carbon into GaAs in CH4 gas ambient

K. Sugioka, K. Toyoda, K. Tachi, M. Otsuka

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OpenAlex topics: Diamond and Carbon-based Materials Research · Semiconductor Quantum Structures and Devices

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References (19)

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19. K. Sugioka, K. Toyoda: Unpublished