Film growth mechanism of photo-chemical vapor deposition
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OpenAlex topics: Advancements in Photolithography Techniques · Optical Coatings and Gratings · Copper Interconnects and Reliability
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References (8)
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4. N. Hirose, T. Inushima, K. Urata, T. Sato, S. Yamazaki: 172nd Meeting of the Electrochemical Society Inc., Honolulu, Hawaii, 1987
5. T. Inushima, N. Hirose, K. Urata, T. Sato, S. Yamazaki: 172nd Meeting of the Electrochemical Society Inc., Honolulu, Hawaii, 1987
6. M. Janai: Thin Solid Films91, 211 (1982)10.1016/0040-6090(82)90110-9 ↗
7. W.F. Berg: Proc. R. Soc. A164, 79 (1938)10.1098/rspa.1938.0006 ↗
8. A. Ookawa: Crystal Growth (Syokabo, Tokyo 1973) p. 192 (in Japanese)