Ranges and standard deviations of implanted ions
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OpenAlex topics: Sensor Technology and Measurement Systems
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References (21)
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1. J.Lindhard, M.Scharff, H.Schiött: Kgl. Danske Videnskab. Selskab. Mat. Fys. Medd.33, 14 (1963)
2. S.Furukawa, H.Ishiwara:Ion Implantation in Semiconductors, ed. by S.Namba (Plenum Press, New York 1975) p. 14310.1007/978-1-4684-2151-4_18 ↗
3. J.Lindhard, M.Scharff: Phys. Rev.124, 128 (1961)10.1103/PhysRev.124.128 ↗
4. O.Firsov: J. Exp. Theoret. Phys. (USSR)36, 1517 (1959)
5. V.Yudin: Japan J. Appl. Phys., Suppl.43, 484 (1974)
6. J.Lindhard, V.Nielsen, M.Scharff: Kgl. Danske Videnskab. Selskab. Mat. Fys. Medd.36, 10 (1968)
7. V.Yudin: Institute “Electronics” (USSR), contributed paper No. DE-325 (1970)
8. V.Yudin: Electron. Techn. (USSR) Ser. 2,2, 3 (1974)
9. D.Smith, J.Gibbons: Abstr. 5th Int. Conf. on Ion Implantation in Semiconductors and other Materials, Aug. 9–13, 1976, Univ. Colorado, Boulder, V2
10. V.Yudin: Doklady Akadem. Nauk (USSR)207, 325 (1972)
11. V.Yudin: Abstr. 2nd Sov. Symp. Interaction Atomic Particles with Solids, Moscow, Akad. Nauk (USSR) (1972) p. 334
12. V.Yudin: Electron. Techn. (USSR) Ser. 2,10, 89 (1974)
13. B.Crowder: J. Electrochem. Soc.118, 943 (1971)10.1149/1.2408229 ↗
14. H.Okabayashi, D.Shinoda: NEC Res. and Develop.35, 10 (1974)
15. W.Johnson, J.Gibbons: “Projected Range Statistics in Semiconductors”, Stanford University (1970)
16. D.Lee, J.Mayer: Proc. IEEE62, 1241 (1974)10.1109/PROC.1974.9603 ↗
17. K.Wittmaack, F.Schulz, B.Heitel: in [2],, ed. by S.Namba (Plenum Press, New York 1975) p. 19310.1007/978-1-4684-2151-4_25 ↗
18. L.Bauer, M.Macpherson, A.Robinson, H.Dill: Solid-State Electron.16, 289 (1973)10.1016/0038-1101(73)90001-4 ↗
19. V.Volod'ko, E.Zorin, P.Pavlov, D.Tetel'baum: Solid State Phys. (USSR)10, 1048 (1968)
20. A.Grigor'ev, L.Nikolaichuk, V.Pistryak, L.Pivovar, V.Yudin: Atomic Science and Technique Problems (USSR), Proc. Phys.-Techn. Institute, Khar'kov1, 93 (1975)
21. J.Tsai, J.Morabito: in [2], ed. by S.Namba (Plenum Press, New York 1975) p. 11510.1007/978-1-4684-2151-4_15 ↗