Damage anneal of antimony/phosphorus double implants in silicon
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OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and interfaces · Integrated Circuits and Semiconductor Failure Analysis
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References (18)
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1. M.Tamura: Appl. Phys. Lett.23, 651–653 (1973)10.1063/1.1654779 ↗
2. T.Ikeda, M.Tamura, N.Yoshihiro, T.Tokuyama: J. Japan. Soc. Appl. Phys. Suppl.44, 311–316 (1975)
3. M.Tamura, N.Yoshihiro, T.Tokuyama: Appl. Phys.17, 31–39 (1978)10.1007/BF00885027 ↗
4. N.Yoshihiro, M.Tamura, T.Tokuyama:Ion Implantation in Semiconductors, ed. by S.Namba (Plenum Press, New York 1975) pp. 571–57610.1007/978-1-4684-2151-4_71 ↗
5. M.Tamura: Phil. Mag.35, 663–691 (1977)10.1080/14786437708235998 ↗
6. T.H.Yeh, M.L.Joshi: J. Electrochem. Soc.116, 73–77 (1969)10.1149/1.2411778 ↗
7. R.B.Fair: J. Electrochem. Soc.125, 923–926 (1978)10.1149/1.2131592 ↗
8. J.Washburn, G.Thomas, H.J.Queisser: J. Appl. Phys.35, 1909–1914 (1964)10.1063/1.1713768 ↗
9. E.T.Yen, B.J.Masters, R.Kastl:Ion Implantation in Semiconductors, ed. by S.Namba (Plenum Press, New York 1975) pp. 501–50910.1007/978-1-4684-2151-4_63 ↗
10. F.F.Morehead, B.L.Crowder:Ion Implantation, ed. by F.H.Eisen and L.T.Chadderton (Gordon and Breach, London 1971) pp. 25–30
11. K.Uda, M.Kamoshida: J. Appl. Phys.48, 18–21 (1977)10.1063/1.323307 ↗
12. B.L.Crowder: J. Electrochem. Soc.118, 943–952 (1971)10.1149/1.2408229 ↗
13. L.Csepregi, J.W.Mayer, T.W.Sigmon: Phys. Lett. A54, 157–158 (1975)10.1016/0375-9601(75)90847-6 ↗
14. L.D.Glowinski, K.N.Tu, P.S.Ho: Appl. Phys. Lett.28, 312–313 (1976)10.1063/1.88765 ↗
15. Y.Tamminga, W.J.M.J.Josquin: Appl. Phys. Lett.32, 13–15 (1978)10.1063/1.89828 ↗
16. A.Bohg: Phys. Stat. Sol (a)46, 445–450 (1978)10.1002/pssa.2210460206 ↗
17. L.Csepregi, E.F.Kennedy, T.J.Gallagher, J.W.Mayer, T.W.Sigmon: J. Appl. Phys.48, 4234–4240 (1977)10.1063/1.323408 ↗
18. L.Csepregi, J.W.Mayer, T.W.Sigmon: Appl. Phys. Lett.29, 92–93 (1976)10.1063/1.88980 ↗