journal article·1999-12-01

Characterisation of combined positive-negative photoresists by excimer laser ablation

J. Wei, N. Hoogen, T. Lippert, Ch. Hahn, O. Nuyken, A. Wokaun

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Abstract

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Research context

OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Semiconductor materials and devices

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