journal article·1989-09

Experimental and computer study of the spatial distributions of particles sputtered from polycrystals

A. I. Dodonov, I. M. Fayazov, S. D. Fedorovich, E. A. Krylova, E. S. Maskova, V. A. Molchanov, W. Eckstein

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OpenAlex topics: Ion-surface interactions and analysis · Microstructure and mechanical properties · X-ray Spectroscopy and Fluorescence Analysis

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References (14)

Show source-provided references
1. R. Behrisch (ed.):Sputtering by Particle Bombardment I. Physical Sputtering of Single-Elemental Solids. Topics Appl. Phys. Vol.47 (Springer, Berlin, Heidelberg 1981)
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3. N.G. Einspruch, D.M. Brown (eds.):VLSI Electronics. Microstructure Science. Vol. 8. Plasma Processing for VLSI (Academic, New York 1984)
4. O. Auciello: InErosion and Growth of Solids Stimulated by Atom and Ion Beams, ed. by G. Kiriakidis, G. Carter, J.L. Whitton (Nijhoff, Dordrecht 1986) p. 39410.1007/978-94-009-4422-0_23 ↗
5. R. Becerra-Acevedo, J. Bohdansky, W. Eckstein, J. Roth: Nucl. Instrum. Methods Phys. Res. B2, 631 (1984)10.1016/0168-583X(84)90281-7 ↗
6. A.I. Dodonov, S.D. Fedorovich, E.A. Krylova, E.S. Maskova, V.A. Molchanov: Nucl. Instrum. Methods Phys. Res. B33, 534 (1988)10.1016/0168-583X(88)90624-6 ↗
7. J.P. Biersack, W. Eckstein: Appl. Phys. A34, 73 (1984)10.1007/BF00614759 ↗
8. J.P. Biersack: Nucl. Instrum. Methods Phys. Res. B27, 21 (1987)10.1016/0168-583X(87)90005-X ↗
9. A.I. Dodonov, S.D. Fedorovich, E.A. Krylova, E.S. Maskova, V.A. Molchanov: Radiat. Eff.107, 15 (1988)10.1080/00337578808225716 ↗
10. A.I. Dodonov, E.A. Krylova, E.S. Mashkova, V.A. Molchanov, S.D. Fedorovich, I.M. Fayazov: Poverchnost7, 133 (1988)
11. V.I. Shulga: Radiat. Eff.82, 169 (1984)10.1080/00337578408215770 ↗
12. V.I. Shulga: Radiat. Eff.85, 1 (1985)
13. A.I. Dodonov, E.S. Mashkova, V.A. Molchanov, V.B. Fleurov: Poverchnost9, 33 (1986)
14. H.E. Roosendaal, J. Sanders: Radiat. Eff.52, 137 (1980)10.1080/00337578008210025 ↗