Contribution to time-resolved enhanced chemical etching and simultaneous annealing of ion implantation amorphized silicon under intense laser irradiation
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Research context
OpenAlex topics: Laser Material Processing Techniques · Advanced Surface Polishing Techniques · Thin-Film Transistor Technologies
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References (8)
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8. H.S. Carslaw, J.C. Jaeger:Conduction of Heat in Solids (Clarendon, Oxford 1984)