Ultrathin-film hardness investigations by a modified atomic force microscope
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Abstract
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Research context
OpenAlex topics: Force Microscopy Techniques and Applications · Adhesion, Friction, and Surface Interactions · Advanced Surface Polishing Techniques
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References (7)
Show source-provided references
1. B. Bhushan: Tribology and Mechanics of Magnetic Storage Devices (Springer, Berlin, Heidelberg 1990)10.1007/978-1-4684-0335-0 ↗
2. H. Bueckle: Micro-Hardness Test and its Application (Berliner Union, Stuttgart 1965)
3. G. Binnig, C.F. Quate, Ch. Gerber: Phys. Rev. Lett. 56, 930 (1986)10.1103/PhysRevLett.56.930 ↗
4. J.B. Pethica, R. Hutchings, W.C. Oliver: Philos. Mag. A 48, 598 (1983)
5. O. Wolter, Th. Bayer, J. Greschner: J. Vac. Sci. Technol. B 9, 1353 (1991)10.1116/1.585195 ↗
6. N.A. Burnham, R.J. Colton: J. Vac. Sci. Technol. A 7, 2906 (1989)10.1116/1.576168 ↗
7. T.A. Jung: Ultramicroscopy 42?44, 1446 (1992)10.1016/0304-3991(92)90464-U ↗