Photo-enhanced etching ofn-Si
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Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence · Nanowire Synthesis and Applications · Thin-Film Transistor Technologies
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References (11)
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8. D.R. Turner:The Surface Chemistry of Metals and Semiconductors (J. Wiley, New York 1960)
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11. H.J. Hoffmann, J.M. Woodall, T.I. Chappell: Appl. Phys. Lett.38, 564 (1981)10.1063/1.92414 ↗