Optical and electronic properties of hydrogenated amorphous silicon films deposited by square-wave modulated RF discharges of silane-he mixtures
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OpenAlex topics: Thin-Film Transistor Technologies · Silicon Nanostructures and Photoluminescence · Silicon and Solar Cell Technologies
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References (25)
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1. Y.S. Tsuo, W. Luft: Appl. Phys. Commun. 10, 71 (1990)
2. J. Perrin, P. Roca i Cabarrocas, B. Allain, J.M. Friedt: Jpn. J. Appl. Phys. 27, 2041 (1988)10.1143/JJAP.27.2041 ↗
3. C. B�hm, J. Perrin: J. Phys. D 24, 865 (1991)
4. H. Kausche, R.D. Pl�tner: In Proc. 11th E.C. Photovoltaic Solar Energy Conf., ed. by L. Guimaraes, W. Palz, C. de Reyff, P. Helm (Harwood, Chur 1992) pp. 195
5. P. Roca i Cabarrocas: J. Non-Cryst. Solids (in press)
6. J.P. Boeuf, Ph. Belenguer: J. Appl. Phys. 71, 4751 (1992)10.1063/1.350666 ↗
7. L.J. Overzet, J.T. Verdeyen: Appl. Phys. Lett. 48, 695 (1986)10.1063/1.96746 ↗
8. Y. Watanabe, M. Shiratani, Y. Kubo, I. Ogawa, S. Ogi: Appl. Phys. Lett. 53, 1263 (1988)10.1063/1.100445 ↗
9. Y. Watanabe, M. Shiratani, H. Makino: Appl. Phys. Lett. 57, 1616 (1990)10.1063/1.104087 ↗
10. A. Lloret, E. Bertran, J.L. And�jar, A. Canillas, J.L. Morenza: J. Appl. Phys. 69, 632 (1991)10.1063/1.347343 ↗
11. J. Perrin, J.P.M. Schmitt: In Proc. 11th E.C. Photovoltaic Solar Energy Conf., ed. by L. Guimaraes, W. Palz, C. de Reyff, P. Helm (Harwood, Chur 1992) pp. 80
12. A.A. Howling, J.-L. Dorier, Ch. Hollenstein: Appl. Phys. Lett. 62, 1341 (1993)10.1063/1.108724 ↗
13. J. Perrin, C. B�hm, R. Etemadi, A. Lloret: Plasma Sources Sci. Technol. (in press)
14. Y. Watanabe, M. Shiratani: Jpn. J. Appl. Phys. 32, 3074 (1993)10.1143/JJAP.32.3074 ↗
15. L.J. Overzet, J.T. Verdeyen, R.M. Roth, F.F. Carasco: MRS Symp. Proc. 98, 321 (1987)10.1557/PROC-98-321 ↗
16. G. Bruno, P. Capezzuto, G. Cicala, P. Manodoro: MRS Symp. Proc. 204, 289 (1991)10.1557/PROC-204-289 ↗
17. J.L. And�jar, E. Bertran, J. Campany, J. Serra, C. Roch, A. Lloret: J. Appl. Phys. 71, 1546 (1992)10.1063/1.351229 ↗
18. P. Roca i Cabarrocas, J. Huc, A. Lloret, J.Y. Parey, J.P.M. Schmitt: J. Vac. Sci. Technol. A 9, 2331 (1991)10.1116/1.577318 ↗
19. A.A. Langford, M.L. Fleet, B.P. Nelson, W.A. Landford, N. Maley: Phys. Rev. B 45, 13367 (1992)10.1103/PhysRevB.45.13367 ↗
20. P. Roca i Cabarrocas, Z. Djebbour, J.P. Kleider, C. Longeaud, D. Mencaraglia, J. Sib, Y. Bouizem, M.L. Th�ye, G. Sardin, J.P. Stoquert: J. Phys. I (Paris) 2, 1979 (1992)
21. W.B. Jackson, N.B. Amer: Phys. Rev. B 52, 555 (1982)
22. I. Chambouleyron, A. Lloret, P. Roca i Cabarrocas, G. Sardin, J. Andreu: Solar Energy Mater. 17, 1 (1988)10.1016/0165-1633(88)90032-9 ↗
23. P. Roca i Cabarrocas, Y. Bouizem, M.L. Th�ye: Philos. Mag. B 65, 1025 (1992)10.1080/13642819208217918 ↗
24. L. Boufendi, A. Plain, J.Ph. Blondeau, A. Bouchoule, C. Laure, M. Toogood: Appl. Phys. Lett. 60, 169 (1992)10.1063/1.106981 ↗
25. R. Martins, I. Ferreira, C.N. Carvalho, A. Ma�arico, L. Guimaraes: MRS Symp. Proc. 258, 153 (1992)10.1557/PROC-258-153 ↗