Photoacoustic monitoring of damage in ion implanted and annealed si layers
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Abstract
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OpenAlex topics: Thermography and Photoacoustic Techniques · Calibration and Measurement Techniques · Laser Material Processing Techniques
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References (14)
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1. K.S. Jones, S. Prussin, E.R. Weber: Appl. Phys. A45, 1 (1986)
2. W.L. Smith, A. Rosencwaig, D.L. Willenborg: Appl. Phys. Lett.47, 584 (1985)10.1063/1.96079 ↗
3. S. Wurm, P. Alpern, D. Savignac, R. Kakoschke: Appl. Phys. A47, 147 (1988)10.1007/BF00618879 ↗
4. H.C. Webber, A.G. Cullis, N.G. Chew: Appl. Phys. Lett.43, 669 (1983)10.1063/1.94440 ↗
5. S.T. Moss:Handbook of Semiconductors (North-Holland, Amsterdam 1980) Vol. 3, p. 771
6. T. Kitamori, M. Fujii, T. Sawada, Y. Goshi: J. Appl. Phys.58, 1546 (1985)
7. O. Pessoa, C.L. Cesar, N.A. Patel, H. Vargas, C. Ghizoni, L.C.M. Miranda: J. Appl. Phys.59, 1316 (1986)10.1063/1.336524 ↗
8. J. Opsal, A. Rosencwaig: J. Appl. Phys.53, 4240 (1982)10.1063/1.331250 ↗
9. T. Papa, F. Scudieri: Opt. Commun.41, 431 (1982)10.1016/0030-4018(82)90171-7 ↗
10. A. Rosencwaig, A. Gersho: J. Appl. Phys.47, 64 (1976)10.1063/1.322296 ↗
11. U. Zammit, M. Marinelli, F. Scudieri, S. Martellucci: Appl. Phys. Lett.50, 830 (1987)10.1063/1.98058 ↗
12. R.C. Weast:Handbook of Chemistry and Physics (CRC, Boca Raton 1984?1985) p. E-13
13. J.R. Meyer, F. Bartoli, M.R. Kruer: J. de Phys. C4,41, 31 (1980)10.1051/jphys:0198000410103100 ↗
14. L. Reimer:Transmission Electron Microscopy. Springer Ser. Opt. Sci. Vol.36 (Springer, Berlin, Heidelberg 1984) p. 16