Large area excimer laser induced deposition of titanium from titanium tetrachloride
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OpenAlex topics: Metal and Thin Film Mechanics · Advanced Materials Characterization Techniques · Diamond and Carbon-based Materials Research
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References (10)
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2. J.Y. Tsao, R.A. Becker, D.J. Ehrlich, F.J. Leonberger: Appl. Phys. Lett. 42, 559?561 (1983)10.1063/1.94027 ↗
3. M. Meunier, C. Lavoie, S. Boivin, R. Izquierdo, P. Desjardins, S.I. Najafi: Mat. Res. Soc. Symp. Proc. Vol. 201 (MRS, Pittsburgh 1991) pp. 625?630
4. C. Lavoie, M. Meunier, S. Boivin, R. Izquierdo, P. Desjardins: J. Appl. Phys. (accepted)
5. S. Boivin, C. Lavoie, R. Izquierdo, S.I. Najafi, M. Meunier: Proc. First Int. Workshop on Photonic Networks, Components and Applications (World Scientific, Singapore 1991) pp. 376?380
6. A. Chretien, W. Freundlich: Noveau Trait� de Chimie Min�rale, Vol. 9, ed. by P. Pascal (Masson et Cie, Paris 1963) p. 71
7. R.C. Weast, M.J. Astle (eds.): CRC Handbook of Chemistry and Physics, 68th edn (CRC Press, Boca Raton 1987) pp. E-389, E-390
8. A very rough estimate using [Ref. 9, Eq. (4.10)] and taking the thermal properties of the substrate, the absorbed energy, and the film thickness, indicates that temperatures between 600� C and the Ti melting temperature of 1668� C are feasible
9. D.J. Ehrlich, J.Y. Tsao (eds.): Laser Microfabrication (Academic, Boston 1989) p. 272
10. D. Altman, M. Faber, D.M. Mason: J. Chem. Phys. 25, 531?536 (1956)10.1063/1.1742960 ↗