DataVXApplied Physics A Solids and SurfacesPaper
journal article·1986-03

New types of periodic structures in laser-induced chemical vapor deposition

Y. C. Du, U. Kempfer, K. Piglmayer, D. B�uerle, U. M. Titulaer

Applied Physics A Solids and Surfaces· Volume 39· Issue 3
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Abstract

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Research context

Materials processing

OpenAlex topics: Laser Material Processing Techniques · Laser-induced spectroscopy and plasma · Silicon Nanostructures and Photoluminescence

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References (16)

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1. For recent reviews see:Laser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem.Phys.39 (Springer, Berlin, Heidelberg 1984)
2. D. Bäuerle: InSurface Studies with Lasers, ed. by F. Aussenegg et al., Springer Ser. Chem. Phys.33 (Springer, Berlin, Heidelberg 1983) p. 17810.1007/978-3-642-82085-4_29 ↗
3. D. Bäuerle: In [Ref. 1a, p. 166]
4. For a recent review see: H.M. v. Driel, J.E. Sipe, J.F. Young, J. Luminescence30, 446 (1985); inHigh Excitation and Short Pulse Phenomena, ed. by M.H. Pilkuhn (North-Holland, Amsterdam 1984) p. 44610.1016/0022-2313(85)90071-7 ↗
5. Z. Guosheng, P.M. Fauchet, A.E. Siegmann: Phys. Rev. B26, 5366 (1982)10.1103/PhysRevB.26.5366 ↗
6. F. Petzoldt, K. Piglmayer, W. Kräuter, D. Bäuerle: Appl. Phys. A35, 155 (1984)10.1007/BF00616969 ↗
7. K. Piglmayer, D. Bäuerle: To be published
8. S. Szikora, J. Otto, D. Bäuerle: Unpublished
9. J.H.Purnell, R.Walsh: Chem. Phys. Lett.110, 330 (1984) and references therein10.1016/0009-2614(84)85239-2 ↗
10. JANAF Thermochemical Tables, Nat. Bur. Stand., USA (1970)
11. K. Piglmayer, J. Doppelbauer, D. Bäuerle: InLaser-Controlled Chemical Processing of Surfaces, ed. by A.W. Johnson et al. (North-Holland, Amsterdam 1984) p. 47
12. G.E. Jellison, F.A. Modine: ORNL/TM 8002 (1982)
13. K. Piglmayer, Y.C. Du, D. Bäuerle: To be published
14. G.J. Fisanick, M.E. Gross, J.B. Hopkins, M.D. Fennell, K.J. Schnoes, A. Katzir: J. Appl. Phys.57, 1139 (1985)10.1063/1.334557 ↗
15. G. Auvert, D. Bensahel, A. Georges, V.T. Nguyen, P. Henoc, F. Morin, P. Croissard: Appl. Phys. Lett.38, 613 (1981)10.1063/1.92452 ↗
16. D.A. Kurtze, W.v. Sarloos, J.D. Weeks: Phys. Rev. B30, 1398 (1984)10.1103/PhysRevB.30.1398 ↗