Si etching affected by ir laser irradiation
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Abstract
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Research context
OpenAlex topics: Laser Material Processing Techniques · Laser Design and Applications · Ocular and Laser Science Research
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References (7)
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1. T.J. Chuang: J. Chem. Phys.72, 6303 (1980)10.1063/1.439045 ↗
2. T.J. Chuang: J. Chem. Phys.74, 1453 (1981)10.1063/1.441132 ↗
3. D.J. Ehrlich, R.M. Osgood, Jr., T.F. Deutsch: Appl. Phys. Lett.38, 1018 (1981)10.1063/1.92228 ↗
4. R.M. Osgood, Jr., A. Sanchez-Rubio, D.J. Ehrlich, V. Damen: Appl. Phys. Lett.40, 391 (1982)10.1063/1.93113 ↗
5. R.J. von Gutfeld, R.T. Hodgson: Appl. Phys. Lett.40, 352 (1982)10.1063/1.93069 ↗
6. B.S. Luk'yanchuk, A.A. Koklin: Preprint No. 128 (in Russian)
7. F.V. Bunkin, B.S. Luk'yanchuk, G.A. Shafeev: Pis'ma Zh. Tekh. Fiz. (USSR)39, 441 (1984)