Light scattering topography and photoluminescence topography
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OpenAlex topics: Silicon Nanostructures and Photoluminescence · Surface Roughness and Optical Measurements · Advanced Semiconductor Detectors and Materials
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References (18)
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17. G.E. McGuire: In Semiconductor Materials and Process Technology, ed. by G.E. McGuire (Noyes Publications, Park Ridge 1988) p. 610
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