Gas phase versus surface contributions to photolytic laser chemical vapor deposition rates
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OpenAlex topics: Advancements in Photolithography Techniques · Electron and X-Ray Spectroscopy Techniques · Surface Roughness and Optical Measurements
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References (12)
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1. A recent overview of the field of LCVD is given by D. Bäuerle:Chemical Processing with Lasers, Springer Ser. Mat. Sci.1 (Springer, Berlin, Heidelberg 1986)10.1007/978-3-662-02505-5 ↗
2. D. Braichotte, H. van den Bergh: Proc. NATO Workshop on ?Emerging Technologies for In Situ Processing?, Cargèse, France (1987)
3. D. Braichotte, H. van den Bergh: Proc. Intl. Conf. on Lasers ?85, Soc. for Optical and Quantum Electronics, pp. 688?696 (1986)
4. D. Braichotte, H. van den Bergh: InLaser Processing and Diagnostics, ed. by D. Bäuerle et al. (Les Editions de Physique, (Les Ulis France) (1986) pp. 95?99
5. M. Qiu, R. Monot, H. van den Bergh: Scientia Sinica A27, 531 (1984)
6. D. Braichotte, H. van den Bergh: Appl. Phys. A44, 353?359 (1987)10.1007/BF00624603 ↗
7. D. Braichotte, H. van den Bergh: InLaser Processing and Diagnostics, ed. by D. Bäuerle, Springer Ser. Chem. Phys.39 (Springer, Berlin, Heidelberg 1984) pp. 183?18710.1007/978-3-642-82381-7_23 ↗
8. D. Braichotte, H. van den Bergh: InIntegrated Optics, ed. by H.P. Nolting, R. Ulrich, Springer Ser. Opt. Sci.48 (Springer, Berlin, Heidelberg 1985) pp. 38?4310.1007/978-3-540-39452-5_10 ↗
9. T.H. Wood, J.C. White, B.A. Thacker: Appl. Phys. Lett.42, 408?410 (1983)10.1063/1.93957 ↗
10. M. Lax: J. Appl. Phys.48, 3919 (1977)10.1063/1.324265 ↗
11. C. Garrido, D. Braichotte, H. van den Bergh: To be published
12. R.R. Krchnavek, H.H. Gilgen, J.C. Chen, P.S. Shaw, T.J. Licata, R.M. Osgood, Jr.: J. Vac. Sci. Technol.B5, 20?26 (1987)10.1116/1.583866 ↗