Laser-reactive ablation deposition of silicon-nitride films
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OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (21)
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1. I.W. Boyd:Laser Processing of Thin Films and Microstructures, Springer Ser. Mater. Sci., Vol. 3, (Springer, Berlin Heidelberg 1987)10.1007/978-3-642-83136-2 ↗
2. E. D'Anna, G. Leggieri, A. Luches: Thin Solid Films218, 219 (1992).10.1016/0040-6090(92)90922-X ↗
3. J. Narayan, P. Tiwari, X. Chen, J. Singh R. Chowdhurty, T. Zheleva: Appl. Phys. Lett.61, 1290 (1992).10.1063/1.107568 ↗
4. E. Fogarassy, A. Slaoui, C. Fuchs, J.P. Stoquert: Appl. Surf. Sci.46, 195 (1990).10.1016/0169-4332(90)90141-L ↗
5. F. Vega, C.N. Afonso, C. Ortega, J. Siejka: J. Appl. Phys.,74, 963 (1993).10.1063/1.354838 ↗
6. J. Solis, F. Vega, C.N. Afonso, E. Georgiu, D. Charalambidis, C. Fotakis: J. Appl. Phys.74, 4271 (1993)10.1063/1.354389 ↗
7. C.E. Otis, P.M. Goodwin: Appl. Phys. Lett.62, 102 (1993)10.1063/1.108824 ↗
8. G. Leggieri, A. Luches, P. Mengucci, I.N. Mihailescu, A. Perrone: In:Laser Deposition of Advanced Materials, ed. by M. Allegrini, A. Giardini Guidoni, A. Morone (Edizioni ETS, Pisa 1992), p. 147
9. V. Craciun, D. Cracium, I.W. Boyd: Mater. Sci. Eng. B18, 178 (1993)10.1016/0921-5107(93)90129-B ↗
10. I.N. Mihailescu, N. Chitica, L.C. Nistor, M. Popescu, V.S. Teodorescu, I. Ursu, A. Andrei, A. Luches, M.L. De Giorgi, A. Perrone, B. Dubreuil, J. Hermann: J. Appl. Phys.74, 5781 (1993)10.1063/1.354198 ↗
11. I.N. Mihailescu, N. Chitica, V.S. Teodorescu, M.L. De Giorgi, G. Leggieri, A. Luches, M. Martino, A. Perrone, B. Dubreuil: J. Vac. Sci. Technol. A11, 2577 (1993)10.1116/1.578609 ↗
12. N.A. Assadulayev, N.B. Brandt, S.M. Chudinov, S.N. Koslov, I. Ciric: J. Appl. Phys.61, 4566 (1987)10.1063/1.338959 ↗
13. M. Petitjean, N. Proust, J.F. Chapeaublanc, J. Perrin: Appl. Phys. A54, 95 (1992)10.1007/BF00348138 ↗
14. A. Borghesi, E. Bellandi, G. Guizzetti, A. Sassella, S. Rojas, L. Zanotti: Appl. Phys. A56, 147 (1993)10.1007/BF00517682 ↗
15. R.M. Gilgenbach, P.L.G. Ventzek: Appl. Phys. Lett.58, 1597 (1991)10.1063/1.105136 ↗
16. P.L.G. Ventzek, R.M. Gilgenbach, C.H. Ching, R.A. Lindley: J. Appl. Phys.72, 1696 (1992)10.1063/1.351693 ↗
17. J.C.S. Kools, T.S. Baller, S.T. De Zwart, J Dielman: J. Appl. Phys.71, 4547 (1992)10.1063/1.350772 ↗
18. L.R. Doolittle: Nucl. Instrum. Methods B9, 344 (1985)10.1016/0168-583X(85)90762-1 ↗
19. J. Zemek, T. Vystrcil, B. Lesiak-Orlowska, A. Jablonski, A. Luches: Unpublished
20. L. Kluber, J.L. Bischoff, D. Bolmont: Phys. Rev. B.38, 13113 (1988)10.1103/PhysRevB.38.13113 ↗
21. Gmelins Handbuch der anorganischen Chemie, Vol. 45, (Springer, Berlin Heidelberg 1991) p. 603