Direct high-resolution excimer laser photoetching
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Abstract
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Research context
OpenAlex topics: Advancements in Photolithography Techniques · Semiconductor materials and devices · Nanofabrication and Lithography Techniques
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References (6)
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2. K. Jain, C.G. Willson, B.J. Lin: IEEE EDL-3, 53 (1982); IBM J. Res. Dev.26, 151 (1982)10.1109/EDL.1982.25476 ↗
3. R. Srinivasan, W.J. Leigh: J. Am. Chem. Soc.104, 6784 (1982)10.1021/ja00388a052 ↗
4. R. Srinivasan, V. Mayne-Banton: Appl. Phys. Lett.41, 576 (1982)10.1063/1.93601 ↗
5. J. Andrew, P. Dyer, R. Greenough, P. Key: Conf. Lasers and Electro-Optics, Baltimore, MD (1983)
6. K. Jain, S.L. Rice, R. Moore: IBM Tech. Disc. Bull. (to appear)