An RBS technique for measurement of the erosion rate of ion implanted films
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Advanced Surface Polishing Techniques
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References (12)
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11. C.Fert, N.Colombie, B.Fagot, Phan Van Chuong: Colloq. Internat. CNRS, Bellevue, Paris 1962, No. 113, CNRS publication, Paris (1962)
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