Influence of nano-twins on {001} texture of L10-FePt thin films

L10-FePt thin film has been considered as a promising material for ultrahigh density perpendicular magnetic recording media. In this work, the L10–FePt thin films have been prepared by magnetron sputtering method on amorphous thermally oxidized SiO2 substrates and annealed by rapid thermal annealing. The texture evolution of L10–FePt thin films have been investigated according to control the film thickness. The texture was quantitatively investigated by X-ray diffraction. The interface microstructure and nano-twins were characterized by electron back scatter diffraction and transmission electron microscopy. The experimental results indicated that film thickness has a strong influence on the strength of {001} texture in L10-FePt films. When the film thickness was 5 nm, the intensity of {001} texture was the strongest. As the film thickness exceeded 15 nm, nano-twins began to appear in the growth direction of L10-FePt film, which changed the grain growth direction. Twinning will deflect the grain growth direction, which is the main reason for the decrease of {001} texture.