journal article·2017-05Open access

Coverage threshold for laser-induced lithography

Weliton S. Martins, Marcos Oriá, Thierry Passerat de Silans, Martine Chevrollier

Applied Physics A· Volume 123· Issue 5

Abstract

Recent experimental observations of laser-induced adsorption at the interface between an alkali vapor and a dielectric surface have demonstrated the possibility of growing metallic films of nanometric thickness on dielectric surfaces, with arbitrary shapes determined by the intensity profile of the light. The mechanisms directly responsible for the accumulation of atoms at the irradiated surface have been shown to involve photo-ionization of atoms very close to the surface. However, the existence of a vapor-pressure threshold for initiating the film growth still raises questions on the processes occurring at the surface. In this letter, we report on the observation that the vapor-pressure threshold corresponds to a minimum adatom coverage necessary for the surface to effectively neutralize the incoming ions and make possible the growth of a multilayer film. We discuss the hypothesis that the coverage threshold is a surface conductivity threshold.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Laser-Matter Interactions and Applications · Laser Material Processing Techniques · Nonlinear Optical Materials Studies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (32)

Show source-provided references
1. D. Ehrlich, J. Tsao, Laser Microfabrication: Thin Film Processes and Lithography (Elsevier Science, Amsterdam, 1989)
2. D. Meschede, H. Metcalf, J. Phys. D Appl. Phys. 36(3), R17 (2003)10.1088/0022-3727/36/3/202 ↗
3. A.E. Afanasiev, P.N. Melentiev, V.I. Balykin, JETP Lett. 86, 172 (2007)10.1134/S0021364007150052 ↗
4. W.S. Martins, T.P. de Silans, M. Oriá, M. Chevrollier, EPL 104, 33001 (2013)10.1209/0295-5075/104/33001 ↗
5. M. Meucci, E. Mariotti, P. Bicchi, C. Marinelli, L. Moi, EPL (Europhysics Letters) 25(9), 639 (1994)10.1209/0295-5075/25/9/001 ↗
6. L. Torralbo-Campo, G.D. Bruce, G. Smirne, D. Cassettari, Sci. Rep. 5, 14729 (2015)10.1038/srep14729 ↗
7. T. Vartanyan, S. Przhibel’skii, V. Khromov, N. Leonov, Light-Induced Surface Diffusion (in Mass Transfer - Advanced Aspects- InTech, 2011)10.5772/21117 ↗
8. E.D. Palik, Handbook of Optical Constants of Solids (Academic Press, New York, 1985)
9. S. Brunauer, P.H. Emmett, E. Teller, J. Am. Chem. Soc. 60(2), 309 (1938)10.1021/ja01269a023 ↗
10. A.A. Adamson, A.P. Gast, Physical Chemistry of Surfaces, vol. 1 (Wiley, London, 1997)
11. T. Kamins, J. Appl. Phys. 39(10), 4536 (1968)10.1063/1.1655798 ↗
12. M. Bouchiat, J. Guéna, P. Jacquier, M. Lintz, A. Papoyan, Appl. Phys. B 68(6), 1109 (1999)10.1007/s003400050752 ↗
13. H.N. de Freitas, A.F.A. da Rocha, M. Chevrollier, M. Oriá, Appl. Phys. B Lasers Optics 76, 661 (2003)10.1007/s00340-003-1161-3 ↗
14. A. Bonch-Bruevich, T. Vartanyan, Y. Maksimov, S.G. Przhibel’skii, JEPT 85(1), 200 (1997)10.1134/1.558308 ↗
15. H. Hoinkes, Rev. Modern Phys. 52(4), 933 (1980)10.1103/RevModPhys.52.933 ↗
16. M.C. Desjonquères, D. Spanjaard, Concepts in surface physics, vol. 30 (Springer Science & Business Media, Berlin, 2012)
17. M. Brause, D. Ochs, J. Günster, T. Mayer, B. Braun, V. Puchin, W. Maus-Friedrichs, V. Kempter, Surf. Sci. 383(2), 216 (1997)10.1016/S0039-6028(97)00174-X ↗
18. N. Lopez, F. Illas, G. Pacchioni, J. Am. Chem. Soc. 121(4), 813 (1999)10.1021/ja981753c ↗
19. I. Langmuir, K. Kingdon, Phys. Rev. 21, 380 (1923)10.1103/PhysRev.21.419 ↗
20. J. Topping, Proc. R. Soc. Lond. Ser. A Contain. Math. Phys. Character 114(766), 67 (1927)10.1098/rspa.1927.0025 ↗
21. R. Gurney, Phys. Rev. 47(6), 479 (1935)10.1103/PhysRev.47.479 ↗
22. V.S. Fomenko, Handbook of Thermionic Properties: Electronic Work Functions and Richardson Constants of Elements and Compounds (Springer Science & Business Media, Berlin, 2012)
23. R. Gerlach, T. Rhodin, Surf. Sci. 19(2), 403 (1970)10.1016/0039-6028(70)90050-6 ↗
24. N. Lang, Phys. Rev. B 4(12), 4234 (1971)10.1103/PhysRevB.4.4234 ↗
25. J.M. Van Wunnik, J. Geerlings, E. Granneman, J. Los, Surf. Sci. 131(1), 17 (1983)10.1016/0039-6028(83)90117-6 ↗
26. M. Wilde, I. Beauport, F. Stuhl, K. Al-Shamery, H.J. Freund, Phys. Rev. B 59(20), 13401 (1999)10.1103/PhysRevB.59.13401 ↗
27. H. Winter, Phys. Rep. 367(5), 387 (2002)10.1016/S0370-1573(02)00010-8 ↗
28. N.S. Rasor, C. Warner, J. Appl. Phys. 35(9), 2589 (1964)10.1063/1.1713806 ↗
29. K.H. Weber, C. Sansonetti, Phys. Rev. A 35(11), 4650 (1987)10.1103/PhysRevA.35.4650 ↗
30. A. Papoyan, J. Guéna, M. Lintz, M.A. Bouchiat, Eur. Phys. J. Appl. Phys. 19(01), 15 (2002)10.1051/epjap:2002044 ↗
31. P. Agnew, J.L. Ing, in Proceedings of the 12th symposium on space nuclear power and propulsion: Conference on alternative power from space; Conference on accelerator-driven transmutation technologies and applications, vol. 324 (AIP Publishing, Melville, 1995), pp. 259–264
32. J. Morris, T. Coutts, Thin Solid Films 47(1), 3 (1977)10.1016/0040-6090(77)90334-0 ↗