Role of Oxygen for Boron Diffusion From Borosilicate Glass Layers Deposited by Atmospheric Pressure Chemical Vapor Deposition

Sebastian Meier; Andreas Wolf; Sebastian Mack; Sabrina Lohmuller; Stefan W. Glunz

doi:10.1109/jphotov.2018.2835445

journal article·2018-07

Role of Oxygen for Boron Diffusion From Borosilicate Glass Layers Deposited by Atmospheric Pressure Chemical Vapor Deposition

Sebastian Meier, Andreas Wolf, Sebastian Mack, Sabrina Lohmuller, Stefan W. Glunz

IEEE Journal of Photovoltaics· Volume 8· Issue 4

Publisher page

Source abstract

Abstract

We investigate the impact of different oxygen concentrations during boron diffusion at 950°C using borosilicate glass (BSG) layers deposited by atmospheric pressure chemical vapor deposition. Therefore, we vary the boron concentration in the BSG layer and the oxygen concentration in the gaseous ambient of the high-temperature step. Characterization includes sheet resistance as well as electrochemical capacitance voltage measurements for the determination of the resulting boron doping profile. In addition, we perform quasi steady-state photoconductance measurements to investigate the influence of the oxygen concentration on the recombination parameters of the boron-diffused surface. Low recombination current densities J0 of J0 = 38 fA/cm ² at a sheet resistance of 54 Ω/sq are observed. Finally, we show that the oxygen concentration is a crucial parameter to prevent the formation of a boron-rich layer at the silicon surface.

Source: openalex_inverted_index · Quality: candidate unverified · Source record ↗

Research context

Ceramics & glasses Materials processing

OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and interfaces · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany

Funding

German Federal Ministry of Economic Affairs and Energy · Heinrich Böll Stiftung

References (42)

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