DataVXIEEE Journal of PhotovoltaicsPaper
journal article·2017-01

Oxidation Drive-In to Improve Industrial Emitter Performance by POCl3 Diffusion

Hongzhao Li, Brett Hallam, Stuart Wenham, Malcolm Abbott

IEEE Journal of Photovoltaics· Volume 7· Issue 1
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Source abstract

Abstract

In this paper, we investigate the influence of different N 2 /O 2 ambient compositions during POCl 3 diffusion on the emitter quality, characterized by secondary ion mass spectrometer and electrochemical capacitance-voltage measurements (J 0E ) and internal quantum efficiency. It is presented that O 2 concentration during the drive-in step strongly impacts both emitter electrical properties and cell performances, supported by the loss breakdown analysis. This process can be easily adapted to the industry, improving the emitter quality for screen-printed solar cells.
Source: openalex_inverted_index · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Silicon and Solar Cell Technologies · Semiconductor materials and devices · Integrated Circuits and Semiconductor Failure Analysis

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (54)

Show source-provided references
1. 10.1063/1.12234510.1063/1.122345 ↗
2. 10.1063/1.315397910.1063/1.3153979 ↗
3. 10.1063/1.36854510.1063/1.368545 ↗
4. 10.1016/j.egypro.2014.08.08710.1016/j.egypro.2014.08.087 ↗
5. An updated analysis to the WCT-120 QSSPC measurement system using advanced device physics
6. Measurement of the emitter saturation current by a contactless photoconductivity decay method
7. 0
8. 10.1016/j.egypro.2015.07.04010.1016/j.egypro.2015.07.040 ↗
9. 10.1016/j.egypro.2012.02.00910.1016/j.egypro.2012.02.009 ↗
10. 10.1109/PVSC.1996.56404210.1109/PVSC.1996.564042 ↗
11. 10.1016/j.egypro.2013.07.25410.1016/j.egypro.2013.07.254 ↗
12. A quasi-steady-state open-circuit voltage method for solar cell characterization
13. 10.1063/1.494932610.1063/1.4949326 ↗
14. Sophistication of doping profile manipulation-emitter performance improvement without additional process step
15. 10.1016/0379-6787(84)90114-510.1016/0379-6787(84)90114-5 ↗
16. 10.1016/j.solmat.2013.06.04610.1016/j.solmat.2013.06.046 ↗
17. 10.1088/0268-1242/23/12/12503210.1088/0268-1242/23/12/125032 ↗
18. 10.1109/PVSC.2010.561426710.1109/PVSC.2010.5614267 ↗
19. 10.1063/1.471751310.1063/1.4717513 ↗
20. 10.1016/0038-1101(73)90056-710.1016/0038-1101(73)90056-7 ↗
21. 10.1002/pip.280610.1002/pip.2806 ↗
22. Status and perspective of emitter formation by POCl3-diffusion
23. 10.1016/j.solmat.2006.03.04010.1016/j.solmat.2006.03.040 ↗
24. 10.1109/PVSC.2009.541132610.1109/PVSC.2009.5411326 ↗
25. Proceedings of the fourth workshop on metallization for crystalline silicon solar cells the nature of screen printed front side silver contacts—Results of the project mikrosol10.1016/j.egypro.2013.11.085 ↗
26. Advances in front-side thick film metallisations for silicon solar cells
27. 10.1063/1.308666310.1063/1.3086663 ↗
28. 10.1016/j.egypro.2013.07.27510.1016/j.egypro.2013.07.275 ↗
29. 10.1109/PVSC.2012.631789710.1109/PVSC.2012.6317897 ↗
30. 10.1109/TED.2012.223141510.1109/TED.2012.2231415 ↗
31. 10.1016/j.egypro.2014.08.09010.1016/j.egypro.2014.08.090 ↗
32. Low resistance screen-printed Ag contacts to POCl3 emitters with low saturation current density for high efficiency Si solar cells
33. Simulation of emitter doping profiles formed by industrial POCl3 processes
34. 10.1149/1.213154410.1149/1.2131544 ↗
35. 10.1109/PVSC.2012.631779210.1109/PVSC.2012.6317792 ↗
36. 10.1016/j.egypro.2013.05.04110.1016/j.egypro.2013.05.041 ↗
37. 10.1109/PVSC.2009.541138110.1109/PVSC.2009.5411381 ↗
38. 10.1016/j.renene.2013.11.06210.1016/j.renene.2013.11.062 ↗
39. Passivation of crystalline silicon using silicon nitride
40. Surface, emitter and bulk recombination in silicon and development of silicon nitride passivated solar cells
41. 10.1002/pssr.20140913810.1002/pssr.201409138 ↗
42. 10.1063/1.36325010.1063/1.363250 ↗
43. 10.1016/j.solmat.2012.06.00710.1016/j.solmat.2012.06.007 ↗
44. 10.1063/1.33064610.1063/1.330646 ↗
45. 10.1063/1.156233810.1063/1.1562338 ↗
46. 10.1149/1.241102710.1149/1.2411027 ↗
47. 10.1109/JPHOTOV.2013.227034810.1109/JPHOTOV.2013.2270348 ↗
48. Self aligning method for forming a selective emitter and metallization in a solar cell
49. 10.1016/j.solmat.2007.05.02610.1016/j.solmat.2007.05.026 ↗
50. green · 1982
51. 10.1109/PVSC.1996.56402310.1109/PVSC.1996.564023 ↗
52. 10.1109/PVSC.2013.674429610.1109/PVSC.2013.6744296 ↗
53. 10.1002/adom.20140039510.1002/adom.201400395 ↗
54. 10.1016/j.solmat.2014.10.00210.1016/j.solmat.2014.10.002 ↗