Research on the Industrial Mass Production Route of N-Type Passivated Contact Silicon Solar Cells With Over 23% Efficiency

Due to the high efficiency, low light-induced degradation and high bifaciality, n-type tunnel oxide passivated contact (TOPCon) solar cell is widely researched and currently being implemented in mass production. In this article, three different TOPCon cell production routes are tested and compared, two routes with phosphorus (P) diffusion first, followed by boron (B) diffusion (Routes 1 and 2) and one route with B diffusion first, followed by P diffusion (Route 3). The differences in process control, manufacturing difficulty, front and rear side passivation, shunting, mass production efficiency, and yield are analyzed. In this article, the results demonstrate that Route 3, with 23.37% efficiency, has the highest cell efficiency and potential to further improve the yield, likely the most suitable TOPCon manufacturing route for industrialization. However, Route 2 also has the opportunity to obtain high efficiency and yield after further optimization.