Experimental and theoretical investigations into the origin of cross-contamination effects observed in a quadrupole-based SIMS instrument
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Electron and X-Ray Spectroscopy Techniques
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (25)
Show source-provided references
1. K. Wittmaack: Radiat. Eff.63, 205 (1982)10.1080/00337578208222841 ↗
2. K. Wittmaack, J.B. Clegg: Appl. Phys. Lett.37, 285 (1980)10.1063/1.91908 ↗
3. C.W. Magee, E.M. Botnick: J. Vac. Sci. Technol.19, 47 (1981)10.1116/1.571015 ↗
4. K. Wittmaack: Nucl. Instrum. Methods218, 327 (1983)10.1016/0167-5087(83)91001-3 ↗
5. V.R. Deline: Nucl. Instrum. Methods218, 316 (1983)10.1016/0167-5087(83)90998-5 ↗
6. J.P. Biersack, W. Eckstein: Appl. Phys. A34, 73 (1984)10.1007/BF00614759 ↗
7. J.A. McHugh: InMethods of Surface Analysis, ed. by A.W. Czanderna (Elsevier, Amsterdam 1975) p. 22310.1016/B978-0-444-41344-4.50013-6 ↗
8. K. Wittmaack: Vacuum32, 65 (1982)10.1016/S0042-207X(82)80001-8 ↗
9. K. Wittmaack: Appl. Phys.12, 149 (1977)10.1007/BF00896140 ↗
10. V.R. Deline, W. Katz, C.A. Evans, Jr., P. Williams: Appl. Phys. Lett.33, 832 (1978)10.1063/1.90546 ↗
11. K. Wittmaack: Nucl. Instrum. Methods168, 343 (1980)10.1016/0029-554X(80)91275-6 ↗
12. W. Reuter, K. Wittmaack: Appl. Surf. Sci.5, 221 (1980)10.1016/0378-5963(80)90063-X ↗
13. A.E. Morgan, H.A.M. deGrefte, H.J. Tolle: J. Vac. Sci. Technol.18, 164 (1981)10.1116/1.570716 ↗
14. W. Eckstein: Private communication (1985)
15. H.H. Andersen, B. Stenum, T. S�rensen, H.J. Whitlow: Nucl. Instrum. Methods B6, 459 (1985)10.1016/0168-583X(85)90003-5 ↗
16. H.H. Andersen, H.L. Bay: InSputtering by Particle Bombardment I, ed. by R. Behrisch, Topics Appl. Phys.47 (Springer, Berlin, Heidelberg 1981) Chap. 4
17. W. Eckstein: InInelastic Particle-Surface Collisions, ed. by E. Taglauer, W. Heiland, Springer Ser. Chem. Phys.17 (Springer, Berlin, Heidelberg 1981) p. 15710.1007/978-3-642-87065-1_11 ↗
18. K. Wittmaack: Nucl. Instrum. Methods218, 307 (1983)10.1016/0167-5087(83)90996-1 ↗
19. H.F. Winters, P. Sigmund: J. Appl. Phys.45, 4760 (1974)10.1063/1.1663131 ↗
20. K. Wittmaack: Surf. Sci.89, 668 (1979)10.1016/0039-6028(79)90648-4 ↗
21. K.G. Libbrecht, J.E. Griffith, R.A. Weller, T.A. Tombrello: Radiat. Eff49, 195 (1980)10.1080/00337578008237483 ↗
22. M.R. Weller, T.A. Tombrello: Radiat. Eff.49, 239 (1980)10.1080/00337578008237488 ↗
23. T. Motohiro, Y. Taga, K. Nakajima: Surf. Sci.118, 66 (1982)10.1016/0039-6028(82)90014-0 ↗
24. V.R. Deline: Private communication (1985)
25. K. Wittmaack: J. Vac. Sci. Technol. A3, 1350 (1985)10.1116/1.572775 ↗