Large-area microprocessing with excimer lasers
Source abstract
Abstract
Pulsed excimer lasers are the by far strongest and most efficient laser sources in the ultraviolet spectral region. On account of the unique lateral resolution of 1 μm, which is achievable with excimer-laser based processing systems as well as of the large field size covered within each laser shot, excimer lasers are indispensable laser sources in pulsed-laser deposition, high-precision marking, low-temperature surface annealing and large-area micropatterning.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Laser Design and Applications · Solid State Laser Technologies · Laser Material Processing Techniques
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References (7)
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