journal article·1999-07-01

Vibrational spectroscopy of SiC thin films deposited by excimer laser ablation

H. Hobert, H.H. Dunken, G. Peiter, W. Stier, M. Diegel, H. Stafast

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Abstract

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Research context

OpenAlex topics: Silicon Carbide Semiconductor Technologies · Advanced ceramic materials synthesis · Semiconductor materials and devices

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