Combined SIMS, AES, and XPS investigations of tantalum oxide layers
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Ion-surface interactions and analysis · Integrated Circuits and Semiconductor Failure Analysis · Semiconductor materials and devices
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (28)
Show source-provided references
1. A. Benninghoven: Surface Sci.53, 596 (1975)10.1016/0039-6028(75)90158-2 ↗
2. J.A. McHugh: InMethods of Surface Analysis, ed. by A.W. Czanderna (Elsevier, Amsterdam 1975) p 221
3. K. Mueller: Springer Tracts Mod. Phys.77, 97 (1975)10.1007/BFb0043169 ↗
4. A. Joshi, L.E. Davis, P.W. Palmberg: InMethods of Surface Analysis, ed. by A.W. Czanderna (Elsevier, Amsterdam 1975) p. 15910.1016/B978-0-444-41344-4.50012-4 ↗
5. K. Siegbahn: J. Elecron. Spectrosc. Rel. Phenom.5, 3 (1974)10.1016/0368-2048(74)85005-X ↗
6. W.M. Riggs, M.J. Parker: In:Methods of Surface Analysis, ed. by A.W. Czanderna (Elsevier, Amsterdam 1975) p. 10310.1016/B978-0-444-41344-4.50011-2 ↗
7. L. Wiedmann, O. Ganschow, A. Benninghoven: J. Vac. Sci. Technol.15, 506 (1978)10.1116/1.569456 ↗
8. L. Wiedmann: Thesis, Münster (1978)
9. G.L. Miller:Tantalum and niobium, (Butterworths, London 1959)
10. P. Kofstad:High Temperature Oxidation of Metals (Wiley & Sons, New York 1966)
11. C.R. Brundle: J. Vac. Sci. Technol.11, 212 (1974)10.1116/1.1318572 ↗
12. A.T. Finkelstein: Rev. Sci. Instrum.11, 94 (1940)10.1063/1.1751660 ↗
13. P.W. Palmberg: J. Vac. Sci. Technol.12, 379 (1975)10.1116/1.568796 ↗
14. A. Benninghoven, H. Bispinck, O. Ganschow, L. Wiedmann: Appl. Phys. Lett.31, 341 (1977)10.1063/1.89692 ↗
15. R.E. Pawel: Rev. Sci. Instrum.35, 1066 (1964)10.1063/1.1718927 ↗
16. C. Plog, L. Wiedmann, A. Benninghoven: Surface Sci.67, 565 (1977)10.1016/0039-6028(77)90015-2 ↗
17. L.E. Davis, N.C. MacDonald, P.W. Palmberg, G.E. Riach, R.E. Weber:Handbook of Auger Electron Spectroscopy, 2nd ed. (Physical Electronics Inc., Eden Prairie 1976)
18. T.J. Chaung, C.R. Brundle, D.W. Rice: Surface Sci.59, 413 (1976); C.R. Brundle: Surface Sci.66, 581 (1977)10.1016/0039-6028(76)90026-1 ↗
19. R. Kelly, N.Q. Lam: Radiat. Eff.19, 39 (1973); see also:Ion Surface Interaction, Sputtering and Related Phenomena, ed. by R. Behrisch, W. Heiland, W. Poschenrieder, P. Staib and H. Verbeck (Gordon and Breach, London, New York, Paris 1973) p. 3710.1080/00337577308232213 ↗
20. P. Sigmund: Phys. Rev.184 383 (1969);187, 768 (1969)10.1103/PhysRev.184.383 ↗
21. H. Oechsner, H. Schoof, E. Stumpe: Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf Solid Surfaces, Vienna (1977) p. 1497
22. W.O. Hofer, P.J. Martin: Appl. Phys.16, 271 (1978)10.1007/BF00885122 ↗
23. H. Oechsner, E. Stumpe: Appl. Phys.14, 43 (1977)10.1007/BF00882632 ↗
24. H.J. Mathieu, D. Landolt: Proc. 7th Intern. Vac. Congr. & 3rd Intern. Conf. Solid Surfaces, Vienna (1977) p. 2023
25. H.W. Werner, N. Warmoltz: Surface Sci.57, 706 (1976)10.1016/0039-6028(76)90356-3 ↗
26. D.K. Murti, R. Kelly: Surface Sci.47, 282 (1975)10.1016/0039-6028(75)90295-2 ↗
27. D.K. Murti: Surface Sci.47, 282 (1975) unpublished work at McMaster University (1974), cited in [26]10.1016/0039-6028(75)90295-2 ↗
28. R. Holm, S. Storp: Appl. Phys.12, 101 (1977)10.1007/BF00900076 ↗