Imprinting by hot embossing in polymer substrates using a template of silica glass surface-structured by the ablation of LIBWE method

Laser-induced backside wet etching (LIBWE) of silica glass plates was performed to fabricate an imprinting template for hot embossing in polymer substrates such as polystyrene and silicone resin. Well-defined inverse surface-micropatterns of gratings and grid arrays on the substrates were produced by the hot embossing using a surface-structured silica glass as the template. These results indicate that the LIBWE method allows us to generate robust glass molding tools that exhibit the inverse shapes of the intended microstructures.