Sputtering of Cu and Zn atoms from elemental and alloy targets

journal article·1980-09

M. Szymoński

Applied Physics· Volume 23· Issue 1

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OpenAlex topics: Ion-surface interactions and analysis · Nuclear Materials and Properties · Integrated Circuits and Semiconductor Failure Analysis

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1. G.E. Chapman, B.W. Farmery, M.W. Thompson, I.H. Wilson. Radiat. Eff.13, 121 (1972)10.1080/00337577208231169 ↗

2. M. Szymoński, A.E. de Vries: Phys. Lett. A63, 359 (1977).10.1016/0375-9601(77)90930-6 ↗

3. M. Szymoński, H. Overeijnder, A.E. de Vries, Radiat. Eff.36, 189 (1978).10.1080/00337577808240847 ↗

4. W. Husinsky, R. Bruckmüller, P. Blum, F. Viehböck, D. Hammer, E. Benes: J. Appl. Phys.48, 11 (1977)10.1063/1.323540 ↗

5. M. Szymoński, R.S. Bhattacharya, H. Overeijnder, A.E. de Vries: J. Phys. D (Appl. Phys.)11, 751 (1978)10.1088/0022-3727/11/5/018 ↗

6. P. Sigmund: InInelastic Ion-Surface Collisions, ed. by N. H. Tolk et al. (Academic Press, New York 1978)

7. J. Sanders: In Radiat. Eff. (submitted for the publication)

8. M.W. Thompson: Philos. Mag.18, 377 (1968)10.1080/14786436808227358 ↗

9. M. Szymoński: Acta Phys. Pol. A56, 289 (1979)10.1063/1.32088 ↗

10. N. Andersen, P. Sigmund: Mat. Fys. Medd. Dan. Vid. Selsk.39, No. 3 (1974)

11. H. Oechsner, J. Bartella: To be published in Proc. of VII. Int. Conf. on Atomic Coll. in Solids, Moscow (1977)

12. P. Sigmund: Phys. Rev.184, 383 (1969)10.1103/PhysRev.184.383 ↗

13. C. Kittel:Introduction to Solid State Physics (John Wiley, New York 1966)

14. K.B. Winterbon:Ion Implantation Range and Energy Deposition Distributions (Plenum Press, New York 1975)10.1007/978-1-4757-5612-8 ↗

15. M.I. Guseva: Fiz. Tverd. Tela1, 1540 (1959)

16. C. Visser, J. Wolleswinkel, J. Los: J. Phys. E (Sc. Instr.)3, 483 (1970)10.1088/0022-3735/3/7/302 ↗

17. P.A. Fin, D.M. Gruen, D.L. Page: Adv. in Chem. Series158, ed. by M. Kaminsky (American Chemical Society, New York 1976) p. 59